Si-nanocluster based memory structures - preparation by thermal annealing of sputtered silicon suboxides, optical and electrical characterization

Si-nanocluster based memory structures - preparation by thermal annealing of sputtered silicon suboxides, optical and electrical characterization

Schmidt, J. U.

no abstract delivered from author

  • Lecture (others)
    Woollam Seminar "Spectroscopic Ellipsometry" 15./16.10. 2002, Ramada Treff Page Hotel, Darmstadt

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