Nano-structured amorphous carbon films synthesised using DECR plasma
Nano-structured amorphous carbon films synthesised using DECR plasma
Golanski, A.; Grambole, D.; Hommet, J.; Herrmann, F.; Kern, P.; Mcdonnel, L.; Piazza, F.; Stoquert, J.-P.
A Distributed Electron Cyclotron Resonance plasma reactor powered by a microwave generator operating at 2.45 GHz was used to deposit ta-C:H (Diamond-Like Carbon, DLC) thin films at RT. A graphite sputtering target immersed in an argon plasma was used as carbon source. The Ar plasma density was about 5 exp(10) cm-3. Single crystal
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Poster
MRS Spring Meeting, San Francisco, USA, April 16 - 20, 2001; Mat. Res. Soc. Symp. Proc. Vol. 675 (2001) W12.2.1 -
Contribution to proceedings
MRS Spring Meeting, San Francisco, USA, April 16 - 20, 2001; Mat. Res. Soc. Symp. Proc. Vol. 675 (2001) W12.2.1
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