Large-depth profiling of hydrogen by line scans of the nuclear microbeam over slope planes cut with an ion beam

For measuring hydrogen concentrations up to a depth of several tens of micrometers we propose the use of a special sample preparation method - ion beam slope
cutting. The principle and the experimental arrangement are described. The depth profiles are obtained by line scans of the nuclear microbeam over the slope planes.
The nuclear reactions (H(15N, alpha0)C)-H-1-C-12 and (H(B, alpha)2alpha)-H-1-B-11 were investigated and proved suitable for hydrogen analysis with the
microbeam detecting the alpha-particles at backward angles.