(AlN)x(SiC)1-x buried layers implanted in 6H-SiC: A theoretical study of their optimised composition

(AlN)x(SiC)1-x buried layers implanted in 6H-SiC: A theoretical study of their optimised composition

Masri, P.; Rouhani, L. M.; Pezold, J.; Yankov, R. A.; Skorupa, W.

no abstract

Applied Surface Science 184 (2001) 383

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