Structural defects in ion implanted 4H-SiC epilayers
Structural defects in ion implanted 4H-SiC epilayers
Persson, P. O. A.; Skorupa, W.; Panknin, D.; Kuznetsov, A.; Hallen, A.; Hultman, L.
no abstract
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Contribution to proceedings
Materials Research Society Symposium Proceeding 640 (2001) H6.2.1
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