Study of photoluminescence in SiOxNy films implanted with Ge ions and annealed under the conditions of hydrostatic pressure


Study of photoluminescence in SiOxNy films implanted with Ge ions and annealed under the conditions of hydrostatic pressure

Tyschenko, I. E.; Zhuravlev, K. S.; Vandyshev, E. N.; Misiuk, A.; Yankov, R. A.; Rebohle, L.; Skorupa, W.

no abstract delivered from author

  • Semiconductors 35 (2001) 129

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