Sponge-like and columnar porous silicon implanted with nitrogen by plasma immersion ion implantation (PIII)
Sponge-like and columnar porous silicon implanted with nitrogen by plasma immersion ion implantation (PIII)
Beloto, A. F.; Ueda, M.; Abramof, E.; Senna, J. R.; Da Silva, M. D.; Kuranaga, C.; Reuther, H.; Ferreira Da Silva, A.; Pepe, I.
Sponge-like and columnar porous silicon implanted with nitrogen by plasma immersion ion implantation (PIII)
- Surface and Coatings Technology 156 (2002) 267 -271
Permalink: https://www.hzdr.de/publications/Publ-5264
