Features of structure formation of TiN coatings obtained by plasma immersion ion implantation assisted deposition

Shevchenko, N.; Rogozin, A.; Matz, W.; Günzel, R.

no abstract

Lecture (Conference)
Proc. 6th Int. Conf. on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, Russia, Sept. 23-28, 2002, pp. 540-543
Contribution to external collection
Proc. 6th Int. Conf. on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, Russia, Sept. 23-28, 2002, pp. 540-543

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