Proximity gettering of Fe in SIMOX structures

Proximity gettering of Fe in SIMOX structures

Skorupa, W.; Yankov, R. A.; Hatzopoulos, N.; Danilin, A.

• Contribution to external collection
  IIT '96, Austin, Texas, USA; Proc. 11th Int. Conf. Ion Implantation Technology; The Inst. of Electrical and Electronics Eng., Piscataway, USA, 1997, p. 737

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