Proximity gettering of copper in separation-by-implanted-oxygen structures

Proximity gettering of copper in separation-by-implanted-oxygen structures

Yankov, R. A.; Hatzopoulos, N.; Skorupa, W.; Danilin, A.

• Lecture (Conference)
  E-MRS, Spring Meeting, Strasbourg, France, 4-7 June 1996
• Nuclear Instruments and Methods in Physics Research B 120 (1996) 60

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