Evolution of microstructure and preferred orientation in TiAlN thin films - an in-situ study
Evolution of microstructure and preferred orientation in TiAlN thin films - an in-situ study
Beckers, M.; Schell, N.; Möller, W.
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Lecture (Conference)
Frühjahrstagung der DPG, Dresden, 24.-28.03.2003
Permalink: https://www.hzdr.de/publications/Publ-5661