The growth of Ti(Al)N thin films studied by synchrotron radiation

The growth of Ti(Al)N thin films studied by synchrotron radiation

Beckers, M.; Schell, N.; Möller, W.

• Lecture (Conference)
  DGK workshop "Characterization of thin films by x-ray scattering", Uckley, 21.-23.05.2003

Permalink: https://www.hzdr.de/publications/Publ-5662