Comparison of measured and calculated dose for plasma source ion implantation into 3-D objects

Comparison of measured and calculated dose for plasma source ion implantation into 3-D objects

Mändl, S.; Barradas, N.; Brutscher, J.; Günzel, R.; Möller, W.

• Nuclear Instruments and Methods in Physics Research B 127/128 (1997) 996-999

Permalink: https://www.hzdr.de/publications/Publ-585