X-ray studies of Al(x)GA(1-x)As implanted with 1.5 meV As ions

X-ray studies of Al(x)GA(1-x)As implanted with 1.5 meV As ions

Wierzchowski, W.; Wieteska, K.; Graeff, W.; Turos, A.; Grötzschel, R.

• Vacuum 70 (2003) 115

Permalink: https://www.hzdr.de/publications/Publ-6247