Fabrication of Schottky barrier MOSFETs on SOI by a self-assembly CoSi₂-patterning method

Fabrication of Schottky barrier MOSFETs on SOI by a self-assembly CoSi₂-patterning method

Zhao, Q. T.; Kluth, P.; Winnerl, S.; Mantl, S.

• Solid State Electronics 47 (2003) 1183

Permalink: https://www.hzdr.de/publications/Publ-6248