In situ monitoring of the ITO film structure and properties during annealing

Shevchenko, N.; Rogozin, A.; Vinnichenko, M.; Prokert, F.; Cantelli, V.; Kolitsch, A.; Moeller, W.

Keywords: ITO; in situ; annealing

Lecture (Conference)
16th International Vacuum Congress IVC-16/ ICSS-12/ NANO-8, June 28 - July 2, 2004, Venice, Italy

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