Range and mixing distributions of low-energy carbon ions as a base for subplantation growth models

Dollinger, G.; Neumaier, P.; Bergmaier, A.; Eckstein, W.; Fischer, R.; Hofsaess, H.; Kroeger, H.; Ronning, C.; Jaeger, H. U.

Lecture (Conference)
European Materials Research Society 2004 Spring Meeting, Symposium J: Synthesis, Characterisation and Advanced Applications of Amorphous Carbon films, contr. J-I.3, 24-28 May 2004, Strasbourg, France

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