Correlation between magnetic properties of CoFe single and CoFe/SiO₂multi-layer thin films and their microstructure, texture and internal stress state

CoFe single and multi-layer systems are diposited by a radio-frequency sputter process. Thickness, roughness, morphology, texture and internal stress state of the layers are determined by X-ray reflectometry, transmission electron microscopy, and diffraction methods. The texture and the internal stress of the layers depend strongly on the parameters of the sputter process. The magnetic properties of the layers are determined from hysteresis curve measurements and magneto-optical Kerr microscopy. A strong correlation between the texture, the internal stress and the magnetic properties of the CoFe layers os observed.