Ion-induced stress relaxation during the growth of cubic boron nitride thin films

Ion-induced stress relaxation during the growth of cubic boron nitride thin films

Abendroth, B.

• Wissenschaftlich-Technische Berichte / Forschungszentrum Rossendorf; FZR-406
  ISSN: 1437-322X

Downloads

• Fulltext PDF 3,5 MB

Permalink: https://www.hzdr.de/publications/Publ-6560