Real-time evolution of the ITO film properties and structure during annealing in vacuum

Real-time evolution of the ITO film properties and structure during annealing in vacuum

Rogozin, A.; Shevchenko, N.; Vinnichenko, M.; Prokert, F.; Cantelli, V.; Kolitsch, A.; Möller, W.

Keywords: Indium Tin Oxide; annealing; structure; in-situ studies

• Other report
  ESRF Highlights 2004

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