Evidence of Self-Aligned Si Nanocluster delta-Layers in Buried SiO₂ Films Induced by Ion Irradiation

Evidence of Self-Aligned Si Nanocluster delta-Layers in Buried SiO₂ Films Induced by Ion Irradiation

Röntzsch, L.; Heinig, K.-H.; Schmidt, B.

An abstract was not required.

Poster
International School on Radiation Effects in Solids, 17.-29.07.2004, Erice, Italy

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