Homogenisation of the melting depth in FLASiC structures


Homogenisation of the melting depth in FLASiC structures

Voelskow, M.

It could be shown that both, the introduction of a melt stop layer in any depth behind the Si / SiC interface and the installation of a surface layer, decreasing the silicon melting temperature, are usefull methods to homogenize the melting depth in the bulk silicon.

Keywords: flash lamp; pulse annealing; silicon carbide

  • Contribution to proceedings
    HeT-SiC-05, 26.04.-01.05.2005, Krippen, BRD
    FZR-433, Dresden: Forschungszentrum Rossendorf, 27-30

Permalink: https://www.hzdr.de/publications/Publ-7398