Impurity gettering effects in SIMOX wafers: what getters what, where and how

Impurity gettering effects in SIMOX wafers: what getters what, where and how

Yankov, R. A.; Kaschny, J.; Fichtner, P.; Mücklich, A.; Kreißig, U.; Skorupa, W.

• Microelectronic Engineering 36 (1997) 129

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