Blue photoluminescence from high-dose Si+ - and Ge+ - implanted silicon dioxide layers
Blue photoluminescence from high-dose Si+ - and Ge+ - implanted silicon dioxide layers
Rebohle, L.; Tyschenko, I. E.; Fröb, H.; Leo, K.; Yankov, R. A.; von Borany, J.; Skorupa, W.
- Microelectronic Engineering 36 (1997) 107
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Lecture (Conference)
10th Biennial Conf. on Insulating Films on Semiconductors, Stenungsund, Sweden, June 11 - 14, 1997
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