Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface
Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface
Castro, R. M.; Ueda, M.; Oliveira, R. M.; Reuther, H.; Morena, B. L. D.
Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface
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Lecture (Conference)
8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil
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