Effects of low magnetic fields on nitrogen implantation in silicon by plasma immersion
Effects of low magnetic fields on nitrogen implantation in silicon by plasma immersion
Tan, I. H.; Ueda, M.; Dallaqua, R. S.; Abramof, E.; Reuther, H.
Effects of low magnetic fields on nitrogen implantation in silicon by plasma immersion
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Lecture (Conference)
8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil
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