Ion beam synthesis of CoSi2 for nano-interconnects
Ion beam synthesis of CoSi2 for nano-interconnects
Schmidt, B.
No abstract was required
Keywords: Ion beam synthesis; Fib; Co++-implantation; nanowires
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Lecture (others)
Seminar FhG Center of Nanotechnology Dresden, 13.10.2005, Dresden, Germany
Permalink: https://www.hzdr.de/publications/Publ-8060