Ion beam synthesis of CoSi2 for nanoscale interconnects
Ion beam synthesis of CoSi2 for nanoscale interconnects
Schmidt, B.
No abstract was required
Keywords: CoSi2; nanowares; nanochains; ion beam synthesis; FIB
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Lecture (others)
Seminar INFINEON Dresden, 16.12.2005, Dresden, Germany
Permalink: https://www.hzdr.de/publications/Publ-8062