Thin highly sensitve pizoresistive cantilevers - fabrication of ultra-shallow pn-junctions

Schmidt, B.

No abstract required

Keywords: Low-energy ion implantation; ultra-shallow boron layers; piezorestistors

Lecture (others)
EU-IP 515739: Technology for the production of massively parallel intelligent cantilever- probe platforms for nanoscale analysis and synthesis, Kick-Off Meeting, 19.-20.04.2005, Erlangen, Germany

Permalink: https://www.hzdr.de/publications/Publ-8063