Resistivity of boron implanted p++ and piezoresistor layers

Zier, M.; Schmidt, B.

No abstract required

Keywords: shallow pn-junction; sheet resistance; piezresistors

Lecture (others)
EU-IP 515739: Technology for the production of massively parallel intelligent cantilever- probe platforms for nanoscale analysis and synthesis, PRONANO WP1 Technical Meeting, 28.-29.11.2005, Kassel, Germany

Permalink: https://www.hzdr.de/publications/Publ-8066