Thin highly sensitive piezoresitive cantilevers - implantation technology

Thin highly sensitive piezoresitive cantilevers - implantation technology

Schmidt, B.

No abstract required

Keywords: Low energy ion implantation; RTA annealing; boron depth profiles

Lecture (others)
EU-IP 515739: Technology for the production of massively parallel intelligent cantilever- probe platforms for nanoscale analysis and synthesis, PRONANO WP1 Technical Meeting, 28.-29.11.2005, Kassel, Germany

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