FIB ion implantation into Si for CoSi2 nanowire growth

Schmidt, B.; Akhmadaliev, C.; Bischoff, L.

No abstract required

Keywords: CoSi2; ion beam synthesis; FIB; nanowires

Lecture (others)
Annual Meeting of the DFG Priority Program 1165: Nanowires and Nanotubes, 02.-04.04.2005, Fulda, Germany

Permalink: https://www.hzdr.de/publications/Publ-8068