Advanced Thermal Processing of Silicon in the msec-Range using Flash Lamps

Skorupa, W.; Panknin, D.; Anwand, W.; Voelskow, M.; European, Flasic Consortium; Yankov, R. A.; Gebel, T.; Paul, S.; Lerch, W.; Downey, D. E.; Arevalo, E.; Mannino, G.

Advanced Thermal Processing of Silicon in the msec-Range using Flash Lamps

Skorupa, W.; Panknin, D.; Anwand, W.; Voelskow, M.; European, F. C.; Yankov, R. A.; Gebel, T.; Paul, S.; Lerch, W.; Downey, D. E.; Arevalo, E.; Mannino, G.

NO abstract available!

Invited lecture (Conferences)
EU-Workshop on Non-conventional thermal processes for advanced CMOS, 21.01.2005, Rom, Italy

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