Ultrathin metal film physical propertiesdetemined by in-situ spectroscopic ellipsometry

Ultrathin metal film physical propertiesdetemined by in-situ spectroscopic ellipsometry

Oates, T. W. H.; Ryves, L.; Bilek, M. M. M.; Mücklich, A.; Mckenzie, D. R.

Keywords: metal film properties; in-situ ellipsometry

• Lecture (Conference)
  Annual Meeting, 18.03.2005, Berlin, Deutschland

Permalink: https://www.hzdr.de/publications/Publ-8265