In-situ spectroscopic ellipsometry determination of morphological and electronic properties of plasma deposited untra-thin metal films

In-situ spectroscopic ellipsometry determination of morphological and electronic properties of plasma deposited untra-thin metal films

Oates, T. W. H.; Mücklich, A.; Ryves, L.; Bilek, M. M. M.; Mckenzie, D. R.; Mcculloch, D. G.; Burgmann, F. A.

Keywords: metal films; in-situ ellipsometry

• Lecture (Conference)
  International Conference on Metallurgical Coatings and Thin Films, 04.-09.05.2005, San Diego, USA

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