Ion bombardment for stress release in cubic boron nitride thin films

Ion bombardment for stress release in cubic boron nitride thin films

Möller, W.; Abendroth, B.; Gago, R.; Kolitsch, A.

no abstract available

Invited lecture (Conferences)
International Conference on Metallurgical Coatings and Thin Films, 02.-06.05.05, San Diego, USA

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