Plasma immersion ion implantation: Process, promises and prospects
Plasma immersion ion implantation: Process, promises and prospects
Möller, W.
no abstract available
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Invited lecture (Conferences)
15th International Colloquium on Plasma Processes, 05.-09.06.05, Autrans, France
Permalink: https://www.hzdr.de/publications/Publ-8296