Reactive ion plasma immersion implantation for surface passivation
Reactive ion plasma immersion implantation for surface passivation
Möller, W.; Shevchenko, N.; Yankov, R. A.; Rogozin, A.; Maitz, M. F.; Richter, E.; Donchev, A.; Schütze, M.
no abstract available
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Invited lecture (Conferences)
8th International Workshop on Plasma-Based Ion Implantation and Deposition, 18.-22.09.05, Chengdu, China
Permalink: https://www.hzdr.de/publications/Publ-8298