Optical properties of PECVD deposited DLC films prepared with air addition

Diamond-like carbon (DLC) films with addition of atmospheric air to benzene were prepared by DC discharge plasma enhanced chemical vapor deposition (PECVD). These films were compared with films made from benzene/argon mixture. Some properties of the films including their optical transmission, hydrogen content and Raman spectra were investigated. It was found that such films fabricated with air addition (even at low vacuum) exhibit properties suitable for optical applications.