Atomic-level simulations of ion implantation, defect formation and defect migration

Atomic-level simulations of ion implantation, defect formation and defect migration

Posselt, M.

for further information, please contact the author

Keywords: ion implantation; defect formation; defect migration; atomic-level simulations

  • Invited lecture (Conferences)
    Seminar, 05.04.2006, Zürich, Switzerland

Permalink: https://www.hzdr.de/publications/Publ-8391