Influence of energetic ions and neutral atoms on the L10 ordering of FePt films

With respect to future magnetic recording materials, the L10-ordering of stoichiometric FePt films (70 nm) deposited on amorphous SiO2 by dc magnetron co-sputtering has been studied. A low deposition rate (0.6 Å/s) and Ar pressure (0.3 Pa) was used. The kinetics of structural A1 - L10 transition and the degree of ordering have been investigated with in-situ X-ray diffraction at the Synchrotron beam line ROBL at ESRF. The transition to almost complete ordered L10 films with an ordering parameter S > 0.8 has been obtained at low temperatures of (320 +/- 20)°C. An additional post-deposition ion irradiation with He ions at RT or at 250°C (50 keV, 1x1015 - 3x1016 cm-2) does not influence this low transition temperature. Theoretical calculations reveal that for our experimental conditions no thermalization of the sputtered atoms and the reflected Ar neutrals in the plasma occur; thus, a considerable fraction of energetic ions and neutrals meet the substrate with energies partly exceeding the displacement threshold. The low transition temperature is explained in the reduction of the activation energy for atomic reordering by point defects which becomes mobile at temperatures higher or equal to 250°C. Using operating conditions with a strong thermalization (deposition at 2 Pa), the FePt film showed an increase of the transition temperature to 400°C and a reduced film density. Finally, the results of first experiments towards patterned L10 ordered FePt layers will be reported.