Predictive process simulation of the FIB-based fabrication of metallic nanoparticle waveguides

Chains of metallic nanoparticles may be applied as surface-plasmonpolariton (SPP) waveguides. Moreover, nanoparticle waveguide structures with small bend radii, e.g. L-turns or beam splitting T-junctions, are of technological interest. In this contribution, we present reaction pathways of the fabrication of 1D metallic nanostructures by focused metal ion implantation and subsequent thermal treatment. Nanowires (NWs) as well as structures consisting of metallic nanoparticle chains were found. The search for reaction pathways was performed by kinetic Monte Carlo simulations including realistic focused ion beam (FIB) implantation profiles which were determined by spatially dependent dynamic ion range calculations. During annealing, buried NWs and more complex structures (e.g. T- or X-junctions) form that are embedded in the matrix along the FIB implantation trace. The diameter of the synthesized NWs is about five times smaller than the width of the FIB implantation trace. The dominating driving force of NW formation is a free energy gain by phase separation and by reduction of high interface curvatures. During longterm thermal annealing, NWs disintegrate into regular chains of nanodots because of the built-up of long-wavelength interface undulations (Rayleigh instability). Crosses, corners or ends of NWs are subject to a preferential disintegration. Thus, by choosing appropriate geometries and implantation conditions, SPP waveguides based on multiple nanodot chains, e.g. L-turns, X- or T-junctions, might be fabricated by FIB implantation. The simulations were performed for focused Co ion implantation into Si since CoSi2 might be a metallic waveguide material with several advantages: monocrystalline embedding into c-Si with coherent (and defect-free) interfaces, CMOS-compatibility, and surface plasmon resonance in the infrared where Si is transparent.