Detection of metastable defective regions in ion-implanted Silicon by means of metall gettering

Kögler, R.; Posselt, M.; Yankov, R. A.; Kaschny, J.; Mücklich, A.; Skorupa, W.; Danilin, A. B.

Lecture (Conference)
MRS '97, Spring Meeting, San Francisco, March 31-April 4, 1997

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