Ion beam analysis by nuclear microprobes

The nuclear microprobe is extensively applied to a wide research field, due to the combination of the good ability of the ion beam analysis and the spatial resolution in the range of a few micrometer.
The nuclear microprobe at the 3MV Tandetron accelerator of the Forschungs-zentrum Rossendorf is one of very few probes about the world, at which all ion beam analytical methods are availably:

• micro Rutherford Backscattering Spectrometry (µRBS) for detection of mainly heavier elements,
• micro RBS – Channeling (µRBS/Channeling) to investigate the crystal structure and damage in small regions,
• micro Elastic Recoil Detection Analysis (µERDA) for profiling of light elements,
• micro Particle Induced X-ray Emission (µPIXE) for mapping of especially trace elements and
• micro Nuclear Reaction Analysis (µNRA) for detection of special light isotopes.

In order to demonstrate the generally analytical performance of nuclear microprobes a selection of various uses of the Rossendorf microprobe for ion beam analysis will be presented and discussed.