The Rossendorf 3 MV tandetron: a new generation of high-energy implanters

The Rossendorf 3 MV tandetron: a new generation of high-energy implanters

Friedrich, M.; Bürger, W.; Henke, D.; Turuc, S.

• Nuclear Instruments and Methods in Physics Research A 382 (1996) pp. 357-360
  DOI: 10.1016/S0168-9002(96)00393-2
  Cited 31 times in Scopus

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