Plasma Immersion Ion Implantation with a 4 kV/10kHz Compact High Voltage Pulser

Plasma Immersion Ion Implantation with a 4 kV/10kHz Compact High Voltage Pulser

Ueda, M.; Oliveira, R. M.; Rossi, J. O.; Reuther, H.; Silva, G.

Plasma Immersion Ion Implantation with a 4 kV/10kHz Compact High Voltage Pulser

Lecture (Conference)
6th International Conference on Íon Implantation Technology, 11.-16.06.2006, Marseille, France

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