Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon
Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon
Hatzopoulos, N.; Panknin, D.; Fukarek, W.; Skorupa, W.; Siapkas, D. I.; Hemment, P. L. F.
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Microelectronic Engineering 28 (1995) pp.415-418
DOI: 10.1016/0167-9317(95)00087-O
Permalink: https://www.hzdr.de/publications/Publ-894