Silicon-on-insulator microcavity light emitting diodes with two Si/SiO2 Bragg reflectors
Silicon-on-insulator microcavity light emitting diodes with two Si/SiO2 Bragg reflectors
Potfajova, J.; Sun, J. M.; Schmidt, B.; Dekorsy, T.; Skorupa, W.; Helm, M.
Light emitting pn-diodes were fabricated on a 5.8 µm thick n-type Si device layer of a silicon-on-insulator (SOI) wafer using standard silicon technology and boron implantation. The thickness of the Si device layer was reduced to 1.3 µm, corresponding to a 4λ-cavity for λ = 1150nm light. Electroluminescence spectra of these low Q-factor microcavities are presented. Addition of Si/SiO2 Bragg reflectors on the top and bottom of the device (3.5 and 5.5 pairs, respectively) is predicted to lead to spectral emission enhancement by ∼270.
Keywords: Silicon; Electroluminescence; Resonant cavity
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Journal of Luminescence 121(2006)2, 290-292
DOI: 10.1016/j.jlumin.2006.08.006
ISSN: 0022-2313
Cited 8 times in Scopus -
Poster
E-MRS 2006 Spring Meeting, 29.05.-02.06.2006, Nizza, Frenkreich
Permalink: https://www.hzdr.de/publications/Publ-9017