Modification of Silicon Nitride Ceramics with High Intensity Pulsed Ion Beams

Modification of Silicon Nitride Ceramics with High Intensity Pulsed Ion Beams

Brenscheidt, F.; Piekoszewski, J.; Wieser, E.; Langner, J.; Grötzschel, R.; Reuther, H.

• Materials Science and Engineering A253 (1998) 86-93
  DOI: 10.1016/S0921-5093(98)00713-8
  Cited 2 times in Scopus
• Lecture (Conference)
  Modification of Ceramics and Semiconductors by Ion Bombardment, Ciocco, Italy, May 19-23, 1997

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