Deposition of tetrahedral hydrogenated amorphous carbon using a novel Elecron Cyclotron Wave Resonance reactor

Deposition of tetrahedral hydrogenated amorphous carbon using a novel Elecron Cyclotron Wave Resonance reactor

Weiler, M.; Lang, K.; Li, E.; Robertson, J.

• Applied Physics Letters Volume 72, Number 11, pp 1314-1316
  DOI: 10.1063/1.121069
  Cited 86 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-911